Characterization of new materials for capacitor formation in integrated circuit technology

Abstract

There have been tremendous developments in electronic technology in the last 40 years as evidenced by the widespread availability of computers, mobile phones and electronic entertainment systems and their continued shrinking in size and cost. Much of the improvement in the performance of electronic systems can be traced to developments in Integrated Circuits (ICs) (“microchips”) which form the fundamental building blocks of modern electronics technology. Within an IC, the most important electronic component is the transistor and it is the transistor that is used to implement the operations associated with computer logic. With each generation of technology, the size of the transistors is reduced and more of them can fit on a single IC, which allows more powerful devices to be made that take up the same or even smaller space and draw less power from the battery. This trend regarding the scaling down in size of the transistors was ...